TWI496220B - 薄膜電晶體及其製造方法

在薄膜電晶體的製程中，通常會在覆蓋通道層的絕緣材料層中製作多個接觸窗開口，讓 ... 本發明提出一種薄膜電晶體的製造方法，包括在基板上形成閘極，在閘極上形成絕緣 ... TWI496220B-薄膜電晶體及其製造方法 -GooglePatents 薄膜電晶體及其製造方法 DownloadPDF Info Publicationnumber TWI496220B TWI496220B TW101113030A TW101113030A TWI496220B TWI496220B TWI496220B TWI496220B TW101113030A TW101113030A TW101113030A TW101113030A TW101113030A TW101113030A TWI496220B TWI496220B TWI496220B Authority TW Taiwan Priorartkeywords layer metal filmtransistor thinfilm drain Priorartdate 2012-04-12 Applicationnumber TW101113030A Otherlanguages English(en) Otherversions TW201342484A (zh Inventor WeiHaoTseng ChiWeiChou HungCheTing OriginalAssignee AuOptronicsCorp Prioritydate(Theprioritydateisanassumptionandisnotalegalconclusion.Googlehasnotperformedalegalanalysisandmakesnorepresentationastotheaccuracyofthedatelisted.) 2012-04-12 Filingdate 2012-04-12 Publicationdate 2015-08-11 2012-04-12 ApplicationfiledbyAuOptronicsCorp filed Critical AuOptronicsCorp 2012-04-12 PrioritytoTW101113030A priority Critical patent/TWI496220B/zh 2013-10-16 PublicationofTW201342484A publication Critical patent/TW201342484A/zh 2015-08-11 Applicationgranted granted Critical 2015-08-11 PublicationofTWI496220B publication Critical patent/TWI496220B/zh Links Espacenet GlobalDossier Discuss 239000010409 thinfilm Substances 0.000 title claims description 65 239000000463 material Substances 0.000 claims description 128 229910052751 metal Inorganicmaterials 0.000 claims description 79 239000002184 metal Substances 0.000 claims description 79 238000000034 method Methods 0.000 claims description 53 229910052760 oxygen Inorganicmaterials 0.000 claims description 36 239000001301 oxygen Substances 0.000 claims description 34 229910044991 metaloxide Inorganicmaterials 0.000 claims description 33 150000004706 metaloxides Chemicalclass 0.000 claims description 33 MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemicalcompound 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O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 33 239000011810 insulatingmaterial Substances 0.000 claims description 25 238000004519 manufacturingprocess Methods 0.000 claims description 25 238000005530 etching Methods 0.000 claims description 21 239000007769 metalmaterial Substances 0.000 claims description 21 238000005496 tempering Methods 0.000 claims description 19 229910052782 aluminium Inorganicmaterials 0.000 claims description 15 XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemicalcompound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15 MUBZPKHOEPUJKR-UHFFFAOYSA-N oxalicacid Chemicalcompound 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[Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3 YVTHLONGBIQYBO-UHFFFAOYSA-N [O--].[Zn++].[In+3] Chemicalcompound 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[O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2 JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth Chemicalcompound 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[O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1 MZLGASXMSKOWSE-UHFFFAOYSA-N Tantalumnitride Chemicalcompound 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[Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1 BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemicalcompound 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[Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1 229910052715 tantalum Inorganicmaterials 0.000 description 1 229910001936 tantalumoxide Inorganicmaterials 0.000 description 1 229910001887 tinoxide Inorganicmaterials 0.000 description 1 QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(II)oxide Inorganicmaterials 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[Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 1 238000001039 wetetching Methods 0.000 description 1 Description 薄膜電晶體及其製造方法 本發明是有關於一種薄膜電晶體及其製造方法，且特別是有關於一種信賴性(Reliability)佳的薄膜電晶體及其製造方法。

近年來，隨著電子技術的日新月異，具有高畫質、空間利用效率佳、低消耗功率、無輻射等優越特性之薄膜電晶體顯示器(ThinFilmTransistorLiquidCrystalDisplay)已逐漸成為市場之主流。

在薄膜電晶體的製程中，通常會在覆蓋通道層的絕緣材料層中製作多個接觸窗開口，讓源極以及汲極可透過此接觸窗與通道層接觸。

一般來說，絕緣材料層的材料通常為有機絕緣材料，然而，由於有機絕緣材料的緻密性較差，因此在製作接觸窗開口時，易造成接觸窗開口的寬/長比(Width/Lengthratio)產生誤差。

如此一來，薄膜電晶體的臨界電壓(ThresholdVoltage)變化量大，使得薄膜電晶體的信賴性不佳，甚至會造成通道層的損害(backchanneldamage)。

本發明提供一種薄膜電晶體的製造方法，其具有良好的蝕刻保護程序以製造出信賴性佳的薄膜電晶體。

本發明提供一種薄膜電晶體，其利用前述製造方法製造，因此具有良好的信賴性。

本發明提出一種薄膜電晶體的製造方法，包括在基板上形成閘極，在閘極上形成絕緣層，然後在絕緣層上形成通道層。

再來，在通道層上形成第一材料層，其中第一材料層包括含氧之絕緣材料。

然後，在第一材料層上形成第二材料層，其中第二材料層包括金屬材料。

之後，在第二材料層以及第一材料層中形成多個接觸窗開口，以暴露出該通道層。

然後，在第二材料層上形成源極以及汲極，其中源極以及汲極透過接觸窗開口而與通道層接觸。

本發明提出一種薄膜電晶體，包括閘極、絕緣層、通道層、源極、汲極、材料疊層以及材料層。

絕緣層覆蓋閘極。

通道層位於閘極上方。

源極以及汲極位於通道層的上方。

材料疊層夾於通道層以及源極之間，且材料疊層夾於通道層以及汲極之間，其中材料疊層包括彼此堆疊的含氧之絕緣材料以及金屬材料。

材料層覆蓋位於源極以及汲極之間的通道層，其中材料層包括含氧之絕緣材料。

材料疊層以及材料層之間具有多個接觸窗開口，源極以及汲極透過接觸窗開口而與通道層接觸。

本發明再提出一種薄膜電晶體，包括閘極、絕緣層、通道層、材料層、源極、汲極以及多個接觸結構。

絕緣層覆蓋閘極。

通道層位於閘極上方。

材料層覆蓋通道層。

源極以及汲極位於材料層上，其中源極以及汲極分別包括由下往上堆疊的一第一金屬層、一第二金屬層、一第三金屬層以及一第四金屬層。

接觸結構位於材料層中以連接源極以及通道層並且連接汲極以及通道層，其中接觸結構包括由下往上堆疊的第二金屬層、第三金屬層以及第四金屬層。

基於上述，本發明之薄膜電晶體的製造方法在通道層上形成包括含氧之絕緣材料的第一材料層，且於第一材料層上形成包括金屬材料的第二材料層。

據此，在製作多個接觸窗開口時，第二材料層中的金屬材料有助於提高接觸窗開口的寬/長比的準確度。

如此一來，薄膜電晶體的臨界電壓可以維持穩定，以提高薄膜電晶體的信賴性。

為讓本發明之上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。

圖1A至圖1G是根據本發明一實施例之薄膜電晶體的製造方法的流程上視示意圖。

圖2A至圖2G是根據本發明之薄膜電晶體的製造方法的流程剖面示意圖。

圖2A至圖2G分別是沿圖1A至圖1G中剖線A-A’的剖面示意圖，其中圖1省略部分膜層的繪示。

請參照圖1A以及圖2A，首先，於基板102上形成閘極104。

基板102的材質可為玻璃、石英、有機聚合物、塑膠或是其它可適用的材料。

閘極104一般是使用金屬材料。

然，本發明不限於此，根據其他實施例，閘極也可以使用其他導電材料。

接著，在閘極104上形成絕緣層106。

絕緣層106覆蓋閘極104以及基板102。

絕緣層106的材質可為氧化矽、氮化矽或有機材料。

再來，在絕緣層106上形成通道層108。

通道層108的材質包括金屬氧化物半導體材料，其例如是氧化銦鎵鋅(Indium-Gallium-ZincOxide,IGZO)、氧化鋅(ZnO)氧化錫(SnO)、氧化銦鋅(Indium-ZincOxide,IZO)、氧化鎵鋅(Gallium-ZincOxide,GZO)、氧化鋅錫(Zinc-TinOxide,ZTO)或氧化銦錫(Indium-TinOxide,ITO)。

然而，本發明不限於此，在其他實施例中，通道層108的材質也可以包括多晶矽、非晶矽或其他適合的材料。

請參考圖1B以及圖2B，在通道層108上形成第一材料層110。

第一材料層110包括含氧之絕緣材料，其例如是氧化矽或氧化氮矽。

第一材料層110的形成方法例如是化學氣相沈積法。

於形成第一材料層110後，進行含氧處理程序，以增加第一材料層110表面的含氧量。

前述含氧處理程序例如是N2 O回火處理程序、O2 回火程序、O2 電漿處理程序或是N2 O電漿處理程序。

接著，於第一材料層110上形成第二材料層112。

第二材料層112包括金屬材料，其例如是鋁(Al)、鈦(Ti)、鉿(Hf)、鋯(Zr)、鉭(Ta)、鉻(Cr)或銅(Cu)。

第二材料層112的形成方法例如是物理氣相沈積法。

請參考圖1C以及圖2C，在第二材料層112以及第一材料層110中形成多個接觸窗開口V以暴露出通道層108。

舉例而言，是於形成第二材料層112後，先利用第一蝕刻製程移除部分的第二材料層112以形成接觸窗開口V的初步圖案。

接著，再利用第二蝕刻製程移除部分的第一材料層110以完成接觸窗開口V的製作。

上述第一蝕刻製程例如是鋁酸、銅酸或草酸濕蝕刻製程，且上述第二蝕刻製程例如是乾蝕刻製程。

請參考圖1D以及圖2D，進行回火程序以使第一材料層110以及第二材料層112之界面產生氧化反應。

於氧化反應後，第一材料層110以及第二材料層112之間形成金屬氧化薄層118，其中金屬氧化薄層118的材質是依所使用的第一材料材110以及第二材料層112的種類而定，且金屬氧化薄層118的厚度例如為50至300。

前述回火程序例如是無氧回火程序。

無氧回火程序例如是氮氣回火程序、化學氣相沈積真空加熱處理程序、N2 O加熱處理程序或真空回火程序。

舉例而言，在形成接觸窗開口V後，利用氮氣回火程序於製程腔室中通入氮氣並加熱至攝氏300度，對上述各膜層進行烘烤(baking)1小時，便可形成氧化金屬薄層118。

此外，上述的無氧回火程序有助於讓接觸窗開口V暴露出的部分通道層108暴露在缺氧的環境下，如此一來，可以增加此部分通道層108的導電度。

值得一提的是，傳統製程是先進行回火程序以形成金屬氧化薄層118後，再進行接觸窗開口V的製作，如此一來，於製作接觸窗開口時，就必須在上述第一蝕刻製程以及第二蝕刻製程之間多一道蝕刻製程來移除金屬氧化薄層118。

相較之下，本發明是先形成接觸窗開口V後，再進行回火程序以形成金屬氧化薄層118，因此可以減少一道蝕刻製程，以簡化製程複雜度。

在其他實施例中，若要進一步的增加通道層108的導電度，還可以通入氨氣(NH3 )以及氫氧(H2 )進行電漿處理程序。

此電漿處理程序有助於讓接觸窗開口V暴露出的部分通道層108暴露在缺氧的環境下，以增加部分通道層108的導電度。

在其他實施例中，若要確保通道層108具有良好的電性品質，還可以進一步進行紫外光照射程序。

紫外光照射程序有助於增加金屬氧化物的導電性進而改善金屬與金屬氧化物的接觸阻抗。

值得一提的是，在進行前述紫外光照射程序時，可以利用前述的第二材料層112作為遮光層，讓紫外光僅照射接觸窗開口V所暴露出的部分通道層108，且避免紫外光照射到其他未被接觸窗開口V暴露出的通道層108，以免紫外光影響到未被接觸窗開口V暴露出的通道層108的性質，因為若通道層108被照射過多的紫外光會使薄膜電晶體無法關閉而失去功用。

請參考圖1E以及圖2E，在第二材料層112上形成導電層M，導電層M填入接觸窗開口V中而與通道層108接觸。

再來，在導電層M上形成圖案化的光阻層PR。

請參考圖1F以及圖2F，利用光阻層PR作為蝕刻罩幕，並對導電層M進行第三蝕刻程序以形成源極114以及汲極116。

具體而言，第三蝕刻程序可以移除部分導電層M以形成源極114以及汲極116。

另外，第三蝕刻程序可以同時移除未被光阻層PR覆蓋的第二材料層112，而且第三蝕刻程序終止於金屬氧化薄層118。

換言之，金屬氧化薄層118不會被第三蝕刻程序移除，因此，在完成第三蝕刻程序後會暴露出位於被移除的第二材料層112下方的金屬氧化薄層118。

前述第三蝕刻程序例如是使用鋁酸蝕刻溶液、草酸蝕刻溶液或是銅酸蝕刻溶夜。

請參考圖1G以及圖2G，首先，移除光阻層PR。

接著，形成保護層120，其中保護層120至少覆蓋源極114、汲極116以及金屬氧化薄層118。

至此，完成薄膜電晶體100的製作。

圖3是根據本發明之一實施例的薄膜電晶體的剖面示意圖。

須說明的是，圖3繪示的薄膜電晶體100a是依照前述之製造方法所完成，因此相同的構件將使用相同或相似的標號，並且省略相同技術內容的說明，下述實施例不再重複描述。

請同時參考圖1G以及圖3，薄膜電晶體100a包括閘極104、絕緣層106、通道層108、源極114、汲極116、材料疊層130以及材料層140。

閘極104位於基板102上方。

絕緣層106覆蓋閘極104。

通道層106位於絕緣層106上方且位於閘極104上方。

材料疊層130位於絕緣層106以及通道層108上方。

材料層140位於通道層108上方。

源極114以及汲極116位於通道層108的上方。

根據本實施例，材料疊層130位於通道層108以及源極114之間，且材料疊層130位於通道層108以及汲極116之間。

材料疊層130包括彼此堆疊的含氧之絕緣材料122以及金屬材料124，其中金屬材料124位於含氧之絕緣材料122上方。

此外，薄膜電晶體100a更可以包括氧化金屬薄層118，其位於含氧之絕緣材料122以及金屬材料124之間。

材料層140覆蓋位於源極114以及汲極116之間的通道層108，其中材料層140包括含氧之絕緣材料122。

此外，薄電晶體100a更可以包括氧化金屬薄層118，其位於材料層140的表面。

在本實施例中，氧化金屬薄層118的材料例如是金屬氧化物半導體材料，且其厚度例如為50至300。

值得一提的是，氧化金屬薄層118具有緻密的薄膜性質，當氧化金屬薄層118覆蓋在含氧之絕緣材料122上時，其可以提供良好的水氣以及氧氣阻隔性。

因此，相較於傳統只有一層絕緣材料層的薄膜電晶體，本實施例之薄膜電晶體100a可以提供良好的水氧阻隔性，使通道層108不易受到大氣環境中水氣以及氧氣的影響，而產生通道層損害的情形。

根據本實施例，多個接觸窗開口V位在材料疊層130以及材料層140之間。

源極114以及汲極116透過這些接觸窗開口V而與通道層108接觸。

根據本實施例，源極114以及汲極116分別包括由下往上堆疊的第一金屬層M1 、第二金屬層M2 以及第三金屬層M3 ，其中第一金屬層M1 與材料疊層130的金屬材料124接觸，而且第一金屬層M1 透過接觸窗開口V與通道層108接觸。

在本實施例中，材料疊層130中的金屬材料124例如為鋁，第一金屬層M1 例如為鉬，第二金屬層M2 例如為鋁，且第三金屬層M3 例如為鉬。

換言之，材料疊層130中的金屬材料124、第一金屬層M1 、第二金屬層M2 以及第三金屬層M3 可以形成由下往上依序為鋁/鉬/鋁/鉬的金屬疊層。

當然，本發明不限於此，在其他實施例中，材料疊層130中的金屬材料124、第一金屬層M1 、第二金屬層M2 以及第三金屬層M3 也可以形成不同堆疊順序或不同金屬種類的金屬疊層，例如是鈦/鉬/鋁/鉬的金屬疊層或鉿/鉬/鋁/鉬的金屬疊層。

為了詳細描述本實施之薄膜電晶體100a的結構，圖3中的虛線X、虛線Y以及虛線Z分別位於薄膜電晶體100a的不同位置，以下將以虛線X、Y以及Z分別說明薄膜電晶體100a不同位置的結構。

沿虛線X由上往下的膜層依序是保護層120、金屬氧化薄層118、含氧之絕緣材料122(材料層140)、通道層108、絕緣層106以及閘極104。

沿虛線Y由上往下的膜層依序是保護層120、第三金屬層M3 、第二金屬層M2 、第一金屬層M1 、通道層108、絕緣層106以及閘極104。

沿虛線Z由上往下的膜層依序是保護層120、第三金屬層M3 、第二金屬層M2 、第一金屬層M1 、金屬材料124、金屬氧化薄層118、含氧之絕緣材料122、通道層108以及絕緣層106。

圖4是根據本發明之一實施例的薄膜電晶體的剖面示意圖。

須說明的是，圖4繪示的薄膜電晶體100b是依照前述之製造方法所完成，因此相同的構件將使用相同或相似的標號，並且省略相同技術內容的說明，下述實施例不再重複描述。

請同時參考圖1G以及圖4，薄膜電晶體100b包括閘極104、絕緣層106、通道層108、材料層150、源極114、汲極116以及多個接觸結構160。

閘極104位於基板102上方。

絕緣層106覆蓋閘極104。

通道層106位於絕緣層106上方且位於閘極104上方。

材料層150覆蓋通道層108。

源極114以及汲極116位於材料層150上方。

接觸結構160位於材料層150中。

根據本實施例，源極114以及汲極116分別包括由下往上堆疊的第一金屬層Ma 、第二金屬層Mb 、第三金屬層Mc 以及第四金屬層Md ，其中第一金屬層Ma 例如為鋁，第二金屬層Mb 例如為鉬、第三金屬層Mc 例如為鋁，且第四金屬層Md 例如為鉬。

換言之，源極114以及汲極116可以分別是由下往上依序為鋁/鉬/鋁/鉬的金屬疊層。

然而，本發明不限於此，在其他實施例中，源極114以及汲極116也可以是由不同堆疊順序或不同金屬種類構成的金屬疊層，例如是鈦/鉬/鋁/鉬的金屬疊層或鉿/鉬/鋁/鉬的金屬疊層。

根據本實施例，接觸結構160可用以連接源極114以及通道層108，且接觸結構160可用以連接汲極116以及通道層108。

具體而言，接觸結構160包括由下往上堆疊的第二金屬層Mb 、第三金屬層Mc 以及第四金屬層Md ，其中第二金屬層Mb 與通道層108接觸。

特別一提的是，接觸結構160不包括第一金屬層Ma 。

另外，本實施例之薄膜電晶體100b更包括氧化金屬薄層118，其位於材料層150之表面。

值得一提的是，氧化金屬薄層118具有緻密的薄膜性質，當氧化金屬薄層118覆蓋在含氧之絕緣材料122上時，其可以提供良好的水氣以及氧氣阻隔性。

因此，相較於傳統只有一層絕緣材料層的薄膜電晶體，本實施例之薄膜電晶體100b可以提供良好的水氧阻隔性，使通道層108不易受到大氣環境中水氣以及氧氣的影響，而產生通道層損害的情形。

為了詳細描述本實施之薄膜電晶體100b的結構，圖4中的虛線X、虛線Y以及虛線Z分別位於薄膜電晶體100b的不同位置，以下將以虛線X、Y以及Z分別說明薄膜電晶體100b不同位置的結構。

沿虛線X由上往下的膜層依序是保護層120、金屬氧化薄層118、材料層150、通道層108、絕緣層106以及閘極104。

沿虛線Y由上往下的膜層依序是保護層120、第四金屬層Md 、第三金屬層Mc 、第二金屬層Mb 、通道層108、絕緣層106以及閘極104。

沿虛線Z由上往下的膜層依序是保護層120、第四金屬層Md 、第三金屬層Mc 、第二金屬層Mb 、第一金屬層Ma 、金屬氧化薄層118、材料層150、通道層108以及絕緣層106。

綜上所述，本發明之薄膜電晶體的製造方法在通道層上依序形成包括含氧之絕緣材料的第一材料層以及包括金屬材料的第二材料層。

據此，在製作多個接觸窗開口時，第二材料層中的金屬材料有助於提高接觸窗開口的寬/長比的準確度。

如此一來，薄膜電晶體的臨界電壓可以維持穩定。

此外，在進行回火程序時可以同時形成金屬氧化薄層於第一材料層以及第二材料層之間，此金屬氧化薄層具有緻密的薄膜性質，因此具有良好的水氧阻隔性質，以進一步提升本發明之薄膜電晶體的信賴性。

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，故本發明之保護範圍當視後附之申請專利範圍所界定者為準。

100、100a、100b．．．薄膜電晶體 102．．．基板 104．．．閘極 106．．．絕緣層 108．．．通道層 110．．．第一材料層 112．．．第二材料層 114．．．源極 116．．．汲極 118．．．金屬氧化薄層 120．．．保護層 122．．．含氧之絕緣材料 124．．．金屬材料 130．．．材料疊層 140、150．．．材料層 160．．．接觸結構 M．．．導電層 M1 、M2 、M3 、Ma 、Mb 、Mc 、Md ．．．金屬層 PR．．．光阻層 A-A’．．．剖線 X、Y、Z．．．虛線 V．．．接觸窗開口 圖1A至圖1G是根據本發明一實施例之薄膜電晶體的製造方法的流程上視示意圖。

圖2A至圖2G是根據本發明之薄膜電晶體的製造方法的流程剖面示意圖。

圖3是根據本發明之一實施例的薄膜電晶體的剖面示意圖。

圖4是根據本發明之一實施例的薄膜電晶體的剖面示意圖。

100．．．薄膜電晶體 102．．．基板 104．．．閘極 106．．．絕緣層 108．．．通道層 110．．．第一材料層 112．．．第二材料層 114．．．源極 116．．．汲極 118．．．金屬氧化薄層 120．．．保護層 V．．．接觸窗開口 Claims(19) 一種薄膜電晶體的製造方法，包括：在一基板上形成一閘極；在該閘極上形成一絕緣層；在該絕緣層上形成一通道層；在該通道層上形成一第一材料層，該第一材料層包括一含氧之絕緣材料；在該第一材料層上形成一第二材料層，該第二材料層包括一金屬材料；在該第二材料層以及該第一材料層中形成多個接觸窗開口，以暴露出該通道層；在該第一材料層以及該第二材料層之間形成一金屬氧化薄層；以及在該第二材料層上形成一源極以及一汲極，該源極以及該汲極透過該些接觸窗開口而與該通道層接觸。

如申請專利範圍第1項所述之薄膜電晶體的製造方法，其中在形成該第一材料層之後，更包括進行一含氧處理程序，以增加該第一材料層表面的含氧量。

如申請專利範圍第2項所述之薄膜電晶體的製造方法，其中該含氧處理程序包括N2 O回火處理程序、O2 回火程序、O2 電漿處理程序或N2 O電漿處理程序。

如申請專利範圍第1項所述之薄膜電晶體的製造方法，其中在形成該些接觸窗開口之後，更包括進行一回火程序，以使該第一材料層以及該第二材料層之界面產生一 氧化反應。

如申請專利範圍第4項所述之薄膜電晶體的製造方法，其中該金屬氧化薄層是於該氧化反應之後形成。

如申請專利範圍第5項所述之薄膜電晶體的製造方法，其中該金屬氧化薄層的厚度為50至300Å。

如申請專利範圍第5項所述之薄膜電晶體的製造方法，其中形成該源極以及該汲極的方法包括：在該第二材料層上形成一導電層，且該導電層填入該些接觸窗開口中；在該導電層上形成一光阻層；以及利用該光阻層作為蝕刻罩幕以對該導電層進行一蝕刻程序以形成該源極以及該汲極，其中該蝕刻程序同時移除未被該光阻層覆蓋的該第二材料層，且該蝕刻程序終止於該金屬氧化薄層。

如申請專利範圍第7項所述之薄膜電晶體的製造方法，其中該蝕刻程序包括使用一鋁酸蝕刻溶液、一草酸蝕刻溶液或一銅酸蝕刻溶液。

如申請專利範圍第4項所述之薄膜電晶體的製造方法，其中該回火程序包括一無氧回火程序。

如申請專利範圍第9項所述之薄膜電晶體的製造方法，其中該回火程序包括氮氣回火程序、化學氣相沈積真空加熱處理程序、N2 O加熱處理程序或真空回火程序。

如申請專利範圍第1項所述之薄膜電晶體的製造方法，其中該第一材料層包括氧化矽或氧化氮矽。

如申請專利範圍第1項所述之薄膜電晶體的製造方法，其中該第二材料層包括鋁、鈦、鉿、鋯、鉭、鉻或銅。

一種薄膜電晶體，包括：一閘極；一絕緣層，覆蓋該閘極；一通道層，位於該閘極上方；一源極以及一汲極，位於該通道層的上方；一材料疊層，夾於該通道層以及該源極之間以及該通道層以及該汲極之間，其中該材料疊層包括彼此堆疊的一含氧之絕緣材料以及一金屬材料；以及一材料層，覆蓋位於該源極以及該汲極之間的該通道層，其中該材料層包括該含氧之絕緣材料，其中該材料疊層以及該材料層之間具有多個接觸窗開口，該源極以及該汲極透過該些接觸窗開口而與該通道層接觸；以及一金屬氧化薄層，位於該材料層的表面以及該材料疊層之該含氧之絕緣材料以及該金屬材料之間。

如申請專利範圍第13項所述之薄膜電晶體，其中該源極以及該汲極分別包括由下往上堆疊的一第一金屬層、一第二金屬層以及一第三金屬層，且該第一金屬層與該材料疊層之該金屬材料接觸。

如申請專利範圍第13項所述之薄膜電晶體，其中 該金屬氧化薄層的厚度為50至300Å。

如申請專利範圍第13項所述之薄膜電晶體，其中該通道層包括金屬氧化物半導體材料。

一種薄膜電晶體，包括：一閘極；一絕緣層，覆蓋該閘極；一通道層，位於該閘極上方；一材料層，覆蓋該通道層；一源極以及一汲極，位於該材料層上，其中該源極以及該汲極分別包括由下往上堆疊的一第一金屬層、一第二金屬層、一第三金屬層以及一第四金屬層；一金屬氧化薄層，位於該材料層之表面以及位於該第一金屬層與該材料層之間；以及多個接觸結構，位於該材料層中，以連接該源極以及該通道層並且連接該汲極以及該通道層，其中該些接觸結構包括由下往上堆疊的該第二金屬層、該第三金屬層以及該第四金屬層。

如申請專利範圍第17項所述之薄膜電晶體，其中該金屬氧化薄層的厚度為50至300Å。

如申請專利範圍第17項所述之薄膜電晶體，其中該通道層包括金屬氧化物半導體材料。

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